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Oxide Wafer
No.
Name
Size
Quantity
Use
1
Lapping Machine
double-faced 6B
3 units
Lapping
2
Polishing Machine
double-faced 6B
3 units
Polishing
3
3set Cleaner
3set 600w
1 unit
Cleaning after Lapping
4
9set Cleaner
9set, DSF967
1 unit
Cleaning after Polishing
5
Tropel
2, 4 inch
1 unit
Measuring flatness
6
Furnace
1200 ¡É
1 unit
Heat treatment
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